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Introducing the INFICON Sion Arc Detector, a highly efficient and non-invasive clamp-on RF detector designed specifically for the iPVD, PECVD, and Etch industries. In the ever-evolving world of microelectronics, the reduction of wafer loss and improvement of yields is paramount. Arcing, a common occurrence during plasma processing, can result in devastating consequences such as target and chamber damage, substrate deterioration, and the creation of unwanted particles.With the decreasing size of microelectronic devices, the vulnerability to arc-induced damage has become a significant concern. This is where the INFICON Sion Arc Detector steps in as a crucial first line of defense. By enabling the detection of micro-arcs quickly and efficiently, the Sion Arc Detector allows users to react promptly, thus mitigating substantial damage or even scrap.Utilizing state-of-the-art technology, the INFICON Sion Arc Detector offers real-time detection and analysis of plasma micro-arcing events. Its non-invasive clamp-on design ensures seamless integration into existing systems without disrupting normal production processes. By providing accurate and timely information on arc occurrences, users can make informed decisions to minimize losses and optimize yields.In the iPVD, PECVD, and Etch industries, where precision and efficiency are essential, the INFICON Sion Arc Detector stands as a reliable and indispensable tool. It ensures the seamless operation of plasma-assisted processes while safeguarding against arc-related damages, ultimately leading to enhanced productivity and cost savings.